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IGZO thin film transistor using Self-Aligned-Imprint-Lithography
Thin film transistor(TFT) is a semiconductor that controls the lighting of a display. TFT consists of active layer, gate electrode, gate insulator and source/drain electrode. Carriers are accumulated to construct the “inverting layer” in semiconductor layer. With the channel in active layer, carriers can be transferred from source to drain electrode. Self-Aligned-Imprint-Lithography(SAIL) is a method fabricating TFT. When manufacturing OLEDs by R2R process, the align step is very difficult. With SAIL method, the align step is not necessary. We just imprint resist with a mold that has TFT pattern. By sequentially etching the pattern we can fabricate a TFT.
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